ICE-2003: Special Symposium

International Conference on Electroceramics
Massachusetts Institute of Technology
Cambridge, MA USA
3-7 August 2003

SPECIAL SYMPOSIUM - CERAMICS INTEGRATION
This special session of the conference is organized with support from the Ceramics Society of Japan and the Society of Non-Traditional Technology of Japan.
Session Chairs:	Prof. Noboru Ichinose, Waseda University Prof. Nobuyasu Mizutani, Tokyo Institute of Technology Prof. Ramamoorthy Ramesh, University of Maryland
This special symposium is focused on the integration of functional bulk and/or thin film ceramic materials with silicon and related technologies. These integrations, most commonly oxides, are designed to satisfy the continued drive towards miniaturization, higher speed circuits, high performance piezoelectric device and nonvolatile memories. New oxides, with considerably higher dielectric constants, but with more complex processing procedures, are now under consideration to replace silica. Nonvolatile memories, based on oxide ferroelectric films, are beginning to enter the marketplace. Optimum performance requires a detailed understanding of how film composition, processing, and electrode selection impact device stability. Integrated piezo- and pyro-electrics and semiconductors promise to play important roles in the development of MEMS-based devices in the sensor, display and communications fields. Topics will include: Epitaxial growth and orientation control Micropatterning Thin film devices and integration Multilayers and functionally graded materials Microscale characterization of integrated structures New piezoelectric devices Composite dielectric materials and devices If interested in abstract submission for this symposium, please see item 6. on the abstract submission page.

For more information, or to be added to
our e-mail announcements list, contact:
Conference Coordinator, ICE-2003
Massachusetts Institute of Technology, Room 13-3118
77 Massachusetts Avenue, Cambridge, MA 02139 USA
ice-2003@mit.edu